Wafer gradd Cynhyrchu SiC 8 modfedd swbstrad SiC 4H-N
Mae'r tabl canlynol yn dangos manylebau ein waferi SiC 8 modfedd:
| Manylebau DSP SiC math-N 8 modfedd | |||||
| Rhif | Eitem | Uned | Cynhyrchu | Ymchwil | Ffug |
| 1:paramedrau | |||||
| 1.1 | polyteip | -- | 4H | 4H | 4H |
| 1.2 | cyfeiriadedd arwyneb | ° | <11-20>4±0.5 | <11-20>4±0.5 | <11-20>4±0.5 |
| 2: Paramedr trydanol | |||||
| 2.1 | dopant | -- | Nitrogen math-n | Nitrogen math-n | Nitrogen math-n |
| 2.2 | gwrthedd | ohm ·cm | 0.015~0.025 | 0.01~0.03 | NA |
| 3: Paramedr mecanyddol | |||||
| 3.1 | diamedr | mm | 200±0.2 | 200±0.2 | 200±0.2 |
| 3.2 | trwch | μm | 500±25 | 500±25 | 500±25 |
| 3.3 | Cyfeiriadedd rhic | ° | [1- 100]±5 | [1- 100]±5 | [1- 100]±5 |
| 3.4 | Dyfnder y Rhic | mm | 1~1.5 | 1~1.5 | 1~1.5 |
| 3.5 | LTV | μm | ≤5 (10mm * 10mm) | ≤5 (10mm * 10mm) | ≤10 (10mm * 10mm) |
| 3.6 | TTV | μm | ≤10 | ≤10 | ≤15 |
| 3.7 | Bwa | μm | -25~25 | -45~45 | -65~65 |
| 3.8 | Ystof | μm | ≤30 | ≤50 | ≤70 |
| 3.9 | AFM | nm | Ra≤0.2 | Ra≤0.2 | Ra≤0.2 |
| 4:Strwythur | |||||
| 4.1 | dwysedd micropibell | yr un/cm2 | ≤2 | ≤10 | ≤50 |
| 4.2 | cynnwys metel | atomau/cm2 | ≤1E11 | ≤1E11 | NA |
| 4.3 | TSD | yr un/cm2 | ≤500 | ≤1000 | NA |
| 4.4 | BPD | yr un/cm2 | ≤2000 | ≤5000 | NA |
| 4.5 | TED | yr un/cm2 | ≤7000 | ≤10000 | NA |
| 5. Ansawdd blaen | |||||
| 5.1 | blaen | -- | Si | Si | Si |
| 5.2 | gorffeniad arwyneb | -- | CMP wyneb-si | CMP wyneb-si | CMP wyneb-si |
| 5.3 | gronyn | pob/wafer | ≤100 (maint ≥0.3μm) | NA | NA |
| 5.4 | crafu | pob/wafer | ≤5, Hyd Cyfanswm ≤200mm | NA | NA |
| 5.5 | Ymyl sglodion/mewnoliadau/craciau/staeniau/halogiad | -- | Dim | Dim | NA |
| 5.6 | Ardaloedd polyteip | -- | Dim | Arwynebedd ≤10% | Arwynebedd ≤30% |
| 5.7 | marcio blaen | -- | Dim | Dim | Dim |
| 6: Ansawdd cefn | |||||
| 6.1 | gorffeniad cefn | -- | AS wyneb-C | AS wyneb-C | AS wyneb-C |
| 6.2 | crafu | mm | NA | NA | NA |
| 6.3 | Diffygion cefn ymyl sglodion/mewnoliadau | -- | Dim | Dim | NA |
| 6.4 | Garwedd y cefn | nm | Ra≤5 | Ra≤5 | Ra≤5 |
| 6.5 | Marcio cefn | -- | Rhic | Rhic | Rhic |
| 7: ymyl | |||||
| 7.1 | ymyl | -- | Siamffr | Siamffr | Siamffr |
| 8: Pecyn | |||||
| 8.1 | pecynnu | -- | Epi-barod gyda gwactod pecynnu | Epi-barod gyda gwactod pecynnu | Epi-barod gyda gwactod pecynnu |
| 8.2 | pecynnu | -- | Aml-wafer pecynnu casét | Aml-wafer pecynnu casét | Aml-wafer pecynnu casét |
Diagram Manwl
Ysgrifennwch eich neges yma a'i hanfon atom ni